Planar ServoRing™

Direct Drive

Rotary Tables

Compact package and superior design

The design of the Planar ServoRing™ rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing™ stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery

 

Brushless Direct Drive

maximizes positioning performance of the Planar ServoRing™ by utilizing  three phase planar brushless motor technology. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance

 

Accurate Positioning 

Performance is assured with 18,000 lines encoder that results in 0.1 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing™ the ideal solution for applications requiring frequent directional changes.

 

       

     

        Features

  • Large center aperture

  • Low profile

  • Unlimited rotation

  • High torque motors

  • Precision bearings

  • High resolution feedback

 

    Specifications

    (model and system dependent)

     

  • torque 150 Nm

  • resolution 0.1 arc-sec

  • repeatability 0.5 arc-sec

  • accuracy 10 arc-sec

  • run-out 5 microns

  • table height 42 mm

  • table OD 200, 300 mm

  • center aperture 115 mm

 

 

 

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