and superior design
design of the Planar ServoRing rotary stages was optimized to minimize stage
height. The low profile of the stage reduces total system working height.
Angular contact bearings are used to maximize performance with respect to
wobble, moment stiffness and friction. Planar ServoRing stage has large clear
center aperture that can be used for air or wire line feed-through or beam
maximizes positioning performance of the Planar ServoRing
three phase planar brushless motor technology.
"Lo-Cog" magnetic design
assures smooth rotation and dynamic performance
Performance is assured with up to 7,200,000 lines encoder that results in 0.18
arc-sec positioning resolution. The motor and rotary encoders are directly
coupled to eliminate coupling backlash. The low inertia and zero backlash
make Planar ServoRing
the ideal solution for applications requiring frequent
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