Planar ServoRing

Direct Drive Rotary Tables




Center aperture 145 mm


Compact package and superior design

The design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. Planar ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery














Brushless Direct Drive

maximizes positioning performance of the Planar ServoRing by utilizing  three phase planar brushless motor technology.

"Lo-Cog" magnetic design assures smooth rotation and dynamic performance


Accurate Positioning 

Performance is assured with up to 7,200,000 lines encoder that results in 0.18 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.


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    (model and system dependent)


  • peak torque 120 Nm

  • resolution 0.18 arc-sec

  • repeatability 0.5 arc-sec

  • accuracy 5 arc-sec

  • run-out 5 microns

  • table height 42 mm

  • table OD 300 mm

  • center aperture 145 mm

  • continuous 360 deg operation


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