MOTORIZED LINEAR ACTUATORS
FOR
CLEAN ROOM APPLICATIONS
Single Axis Clean Room Compatible
Linear Actuators BSMA-CR is a motorized precision ball-screw
driven actuator with a carriage guided by the linear bearings
installed in the U-shape aluminum housing.
Clean Room rating is achieved through a
sealed structure and high durability stainless steel strip cover. The
actuator body is electro-less plated for corrosion resistance. Actuator
has vacuum suctions ports to exhaust any particles generated by the
moving parts.
BSMA-CR actuators are best suited for
applications in semiconductor, flat panel display and electronic
components man ufacturing
and can be integrated into multi-axes robotic systems.
SPECIFICATIONS
-
Stroke: 050 ~ 800
mm
-
Single or
double carriage
-
Ball screw pitch:
2.5, 5, 10, 16 mm
-
Repeatability: 2
microns
-
Load
capacity: 100 Kg
-
Speed: 400 mm/sec
-
Motor: Nema17, 23
(stepper or brushless servo)
-
Sensors:
home (1), limits (2)
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