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DIRECT DRIVE RotoLinear Z-θ STAGES

Compact High Performance Z-Theta Positioning System

 

Dual Axis Z-Theta brushless motors with integral air bearings

 

 

 

 

 

 

 

 

 

 

 

 

 

 

The RotoLinear Z-θ Positioning Module is a high performance dual-axis air bearing system that replaces bulkier conventional electro-mechanical actuators in pick-and-place applications. It combines the latest brushless servo motor, encoder and air bearing technologies to deliver precise, programmable position and speed control in an extremely compact package. This Z-θ stage utilizes 2-axis Planar and air bearing technologies. The drive, bearings and feedback are totally non-contact. The RotoLinear Stage has a hole-through to route auxiliary vacuum and electrical lines to the top surface of the stage.

Can be installed on the Planar XY forcer to operate as robotic X-Y-Z-Theta cell.

 

 
Z-Axis Parameter Spec Theta-Axis Parameter Spec
Nominal Stroke 12 mm Rotation Range Unlimited
Accuracy ± 10 µm Accuracy ± 30 arc-sec
Repeatability ± 1 µm Repeatability ± 1 arc-sec
Resolution 1 µm Resolution ± 1 arc-sec
Straightness/Flatness