|
XY-ROTARY
combination stage
features small profile and
high precision
|
Precision motorized
XY-Rotary
LSMA-RTHM combination positioning stages offer superior
positioning performance in a very compact, low profile unit. They are ideal
for space-critical optical, semiconductor, laser and vacuum applications.
Constructed from a special lightweight machined aluminum alloy to provide
high stiffness and long-term stability with linear ball bearings for low
friction and superior motion smoothness. These precision actuators with
micrometer-grade 0.5 mm pitch screws provides exceptional accuracy,
repeatability, and ultra-fine positioning resolution. Stages can be driven
by brushless servo or micro-stepped motor.
Specifications:
|
Parameter / Axis |
X |
Y |
R |
| travel range |
50 ... 200 mm |
360 deg |
| resolution (*) |
0.25 micron |
3 arc-sec |
| max speed(*) |
25 mm/sec |
10 rpm |
| max load |
10 Kg |
| axes |
linear stage
LSMA-200 |
linear stage
LSMA-200 |
rotary
RTHM-191 |
| motor |
micro-stepper, DC servo, "Smart motor" |
* -
parameter dependent on the motor/encoder combination |
