Micro XYZ Stage XYZ-TS15J
The precision ball screws provide excellent accuracy and repeatability with ultra-fine positioning resolution capability of 0.1 micron when driven by the stepper motor. The servomotor version is equipped with a rotary encoder and provides exceptionally smooth travel.
Stroke |
mm |
15x15x15 |
Screw lead |
mm |
1.0 |
Motor mounts size |
|
Nema11 (28 mm) |
Motor type |
|
Stepper (standard) Servo/encoder 1000cpr |
Repeatability |
micron |
± 2 |
Load horizontal / vertical |
kg |
3 / 1 |
Stage weight |
kg |
0.6 |
Speed |
mm/sec |
60 (stepper) 120 (servo) |