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News-Planar XY Table with ZR

 

XY-LIFT-ROTARY

4-AXES SYSTEM

 

Cartesian Planar XY Table integrated with Lift Linear Actuator and Rotary Table

 

 Air bearing integrated stages

 

 

 

 

 

IntelLiDrives Cartesian Planar XY Table offers the unique capability to operate two axes of motion in one plane with one motor. These systems designed to replace conventional compounded XY tables  where one axis is being carried by another. As a result, with the planar systems greater reliability and performance is realized through design simplification and elimination of wear-prone components.

 

Multi axes XY-Z-Rotary system integrates XY planar forcer with air bearing Lift-Rotary Stage. Planar  XY Table can operate in any orientation (side wall, upside-down) with multiple forcers installed and operated  independently on a single platen for high throughput and flexibility in many robotic automation applications.

Specifications:

Parameter / Axis XY Table Z (Lift) R
travel range

600 x 600 mm

25 mm 360 deg
resolution 1 micron 1 micron 3 arc-sec
max speed 600 mm/sec 200 mm/sec 10 rpm
max load 10 Kg
bearings air
axes

Planar XY 

Table

Lift

Linear Actuator

Rotary table

 

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