XY-LY-140H-300x300-MLVT-15J-RTLA-16-60J
Combination of XY ball-screw driven BSMA XY stages with Lift MLVT stages and compact worm gear rotary RTLA table
- XY stroke 300x300 mm
- Lift 15 mm
- Unlimited rotation
XY stage BSMA-LY-140H-300x300 |
Spec |
Lift Stage MVLT-15J |
Spec |
Rotary Stage RTLA-16-60J |
Spec |
Stroke (mm) |
300 x 300 |
Lift (mm) |
15 |
Rotation |
unlimited |
Repeatability (µm) |
10 |
Repeatability (µm) |
10 |
Repeatability (arc-sec) |
30 |
Resolution (µm) |
Motor and driver dependent |
Resolution (arc-sec) |
Motor and driver dependent |
Load (kg) |
5 |
Load capacity (kg) |
16 |
Lift translation (mm/rev) |
1 |
Weight (kg) |
0.8 |
Velocity (mm/sec) |
25 (servo) |
Max velocity (mm/sec) |
20 |
Angular velocity (rpm) |
10 |
Mechanism, screw lead (mm) |
ball-screw 4 |
Mechanism, screw lead (mm) |
belt 1 |
Mechanism, ratio |
worm gear 90:1 |
Motor |
stepper servo |
Motor |
stepper/servo/encoder/ Smart |
Motor |
stepper servo |