Intellidrives

Linear Actuators, Rotary Tables and XYZ Systems
for Motion Control Automation
Phone image Click to chat Click to chat Parametric Search New Products

Linear and Rotary Motion in its Simplest Form™

Phone image Phone image Click to chat Click to chat Parametric Search New Products IMAC Live DemoIMAC Live Demo
Home
Phone image
Click to Skype
Click to chat
Parametric Search
New Products
You are here:    Home > XYR-65-10x10-AUT-ACR-65AUT
IntelLiDrives Products
  • Linear Actuators
  • Linear Actuators - Moving Shaft
  • Lift Stages
  • Combination XY-Lift-Rotary
  • Rotary Tables
  • Rotary Actuators and Stages
  • XY Tables and Stages
  • XY and XYZ Systems
  • Controllers and Drives
  • Encoders
 
Parametric Search
  • Linear Actuators
  • Rotary Tables
  • XY Tables and XYZ Systems
  • Combination Systems
  • Lift Actuators
 
Information
  • Home
  • Videos
  • Request Quote/Information
  • Search
  • Application Info
  • Contact Us - Email
  • Address, Phone, Skype
  • News
  • Community
 
Powered by Crafty Syntax
Skype Me!
Telephone: (215) 728-6804 (USA)
IMAC Live DemoIMAC Live Demo
 

XYR-65-10x10-AUT-ACR-65AUT

rotary table with absolute encoder
Click to enlarge
Quantity:

Add To Quote Cart

Add the selected product(s) to the quote request cart by clicking the “Add to Quote" button on any product page. You may continue viewing other products.

If you want to add this product to the quote, press the Add To Quote Cart button *BEFORE* pressing the Send Quote/Information Request button


Send Quote/Information Request
When done selecting products to quote, click “Request Quote/Information” button. This will take you to check-out page to send quote request to IntelLiDrives.
DescriptionSpecificationsDrawingsRelated
XY-Rotary stages with linear motors and direct torque motors designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive linear motor drive provides sub-micron XY positioning and direct drive rotary stage assures sub-arcsec performance

 

Click Below Images To Enlarge

There are no related products for this product.
Parameters
Unit

XY-65-10x10-AUT-ACR-65AUT​

 

XY table

 

 

XY-65-10x10-AUT

Rotary table  

ACR-65UT

Motor type

 

XY linear servo motor
Rotary stage direct torque motor

XY stroke

mm x mm

 

10x10

Angular rotation deg 50 

 

   

Resolution (linear)

micron

0.5

Resolution (rotary) arc-sec 0.6

Repeatability (linear)

micron

1

Repeatability (rotary) arc-sec 1

Speed

mm/sec

200

Load weight kg 2

Stage weight

kg

44

 

 

 

 

 © 1999-2019 IntelLiDrives Inc. | 8510 Bustleton Ave | Philadelphia, PA 19152, USA  |  (215) 728-6804 |  sales@intellidrives.com | Skype: intellidrives