Rotary table PSR-180UT (Ultrathin)

Rotary table PSR-180UT (Ultrathin)
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Diameter 180 mm

Aperture 55 mm

Height 22 mm


 

Planar ULTRATHIN ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing stage yields the lowest total cost of ownership.

 

Compact package and Superior design of the Planar ULTRATHIN ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ULTRATHIN ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

 

Planar ULTRATHIN ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance.

 

Accurate Positioning is assured with contactless encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ULTRATHIN ServoRing the ideal solution for applications requiring frequent directional changes.

 

 

Semiconductor assembly

    Electronics assembly

Precision machine tools

    Robotic handlers

Wafer processing

    Automation

 

System performance

Unit

PSR 180UT

 

 

 

Tabletop diameter

mm

167

Height

mm

22

Aperture

mm

55

Motor type

 

Direct drive

Three phase brushless

Number of pole pairs

 P

13

Peak torque

Tp (Nm)

28

Continuous torque   

Tc (Nm)

7

Peak current

Amp

10

Continuous current

Amp

2.5

Encoder (1Vpp sine/cos)

 Lines/rev  

 540

Axial / radial load             

Kg

30/15

Peak/rated speed  

RPM

300/150

Resolution / repeatability

arc-sec

2/10

Rotor inertia

Kg·m2

0.005

Stage weight

Kg

3

Construction

 

Rotor – steel

Stator - aluminum

Planar

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