Rotary table PSR-200MHS

Rotary table PSR-200MHS
Click to enlarge

 

Diameter 200 mm

Aperture 55 mm

Height 42 mm


Planar ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing stage yields the lowest total cost of ownership.

 

Compact package and Superior design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ULTRATHIN ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

 

Planar ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.

 

Accurate Positioning is assured with MHS type contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. MHS encoder allows to achieve 5 arc-sec accuracy  for PSR300 and 8 arc-sec accuracy for PSR200.

 

Semiconductor assembly

    Electronics assembly

Precision machine tools

    Robotic handlers

Wafer processing

    Automation

 

System performance

Unit

PSR-200MHS

PSR-300MHS

 

 

 

 

 

Tabletop diameter

mm

200

290

Height

mm

42

42

Aperture

mm

55

145

Motor type

 

Three phase brushless

Y winding (standard)

Δ winding (optional)

Number of pole pairs

 P

17

31

Peak Torque                                    

Tp (Nm)

(note 1)

45

110

Continuous torque   

Tc (Nm)

(note 2)

17

41

Peak current

Amp

14

Continuous current

Amp

5.1

Digital encoder    

standard

optional

 

Counts/rev

 

 

2,560,000

5,120,000

 

3,600,000

7,200,000

Axial load                 

Kg

(note 5)

50

80

Accuracy              

Arc-sec

8

5

Bus voltage

VDC

VAC

150

120

310

220

150

120

310

220

Max. speed @ Tp    

RPM

(note 6)

175

430

50

150

Rated speed @ Tc    

RPM

(note 6)

335

725

124

281

Bearing run-out  

Microns

 (note 7)

10

Rotor inertia

Kg·m2

0.01

0.062

Stage weight

Kg

8

5

Construction

 

Rotor – steel

Stator - aluminum

Planar

Note 1

1sec. duration, coil at 20°C

Note 2

Coil at 120°C

Note 4

RS422, TTL, 5VDC, differential, quadrature, index mark

Note 5

Load capacity rated at 1/10 of bearing L10 rating

Note 6

Rated speed based on amplifier bus voltage and motor “Y” winding.

Higher speed (Δ) winding on request.

Actual speed depends on the encoder resolution, interpolation factor and load.

Note 7

-P precision ABEC 7 bearing

 

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