Rotary table ACR-32UT (Ultrathin)

Rotary table ACR-32UT (Ultrathin)
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Diameter 116 mm

Aperture 32 mm

Height 22 mm


 

UltraThin ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the AccuRing stage yields the lowest total cost of ownership.

 

Compact package and Superior design of the AccuRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. AccuRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

 

AccuRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. Coreless magnetic design assures smooth rotation and dynamic performance.

 

Accurate Positioning is assured with contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make AccuRing the ideal solution for applications requiring frequent directional changes.

 

 

Semiconductor assembly

    Electronics assembly

Precision machine tools

    Robotic handlers

Wafer processing

    Automation

 

 
System Performance

Unit

ACR-32UT

Center aperture

mm

32

Outside diameter

mm

116

Stage height

mm

22

Peak Torque

Tp

 (Nm)

15

Continuous torque

air cooling, coil 120°C

Tc120

(Nm)

5

Peak current at Tp

Amp p rrms

15

Continuous current at Tc

Amp c rrms

4

Recommended voltage (note 1)

Uvdc

Uvac

310

220

Max speed  

(note 2, 3)

RPM

1,400

Positioning resolution

(note 3)

counts/rev

 

3,600,000 (standard)

7,200,000

(optional)

Positioning resolution

(arc-sec)

0.60

Accuracy

Arc-sec

<10

Repeatability Arc-sec <1

Run-out axial/radial

micron

<10

Rotor Inertia kg x m2 0.05

Stage weight

M (Kg)

3

Axial load

M (Kg)

10

 

Note 1: Rotary table can operate at lower voltages with lower speeds

Note 2: Max speed shown with no external torque applied

Note 3: Max speed may be limited by controller's encoder frequency input.

            Sin/cos 1 Vpp and other encoder resolutions available.

            Contact the factory.

 

 

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