Rotary table PSR-300

Rotary table PSR-300
Click to enlarge

 

Diameter 290 mm

Aperture 115 mm

Height 42 mm


Planar ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing stage yields the lowest total cost of ownership.

 

Compact package and Superior design of the Planar ServoRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ULTRATHIN ServoRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

 

Planar ServoRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance.

 

Accurate Positioning is assured with contactless encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.

 

 

Semiconductor assembly

    Electronics assembly

Precision machine tools

    Robotic handlers

Wafer processing

    Automation

System performance

Unit

PSR 150

PSR 200

PSR  300

 

 

 

 

 

Tabletop diameter

mm

140

200

290

Height

mm

40

42

42

Aperture

mm

15

40

114 (145)

Motor type

 

Three phase brushless

Y winding (standard)

Δ winding (optional)

Number of pole pairs

 P

13

17

31

Peak Torque                                    

Tp (Nm)

(note 1)

23

45

110

Continuous torque   

Tc (Nm)

(note 2)

8.7

17

41

Peak current

Amp

14

Continuous current

Amp

5.1

Sine encoder

standard

optional

 Lines/rev

  (note 3)

 

2,048

3,600

 

2,048

10,000

 

5,400

18,000

Digital encoder    

standard

optional

 Counts/rev

 (note 4)

 

409,600

(note 4)

 

409,600

(note 4)

 

1,080,000

(note 4)

Axial load                 

Kg

(note 5)

30

50

80

Bus voltage

VDC

VAC

150

120

310

220

150

120

310

220

150

120

310

220

Max. speed @ Tp    

RPM

(note 6)

330

790

175

430

50

150

Rated speed @ Tc    

RPM

(note 6)

900

2000

335

725

124

281

Bearing run-out  

Microns

 (note 7)

15 (-N),  10(-P),  5 (-SP)

Rotor inertia

Kg·m2

0.004

0.01

0.062

Stage weight

Kg

5

7

10

Construction

 

Rotor – steel

Stator - aluminum

Planar

Note 1

1sec. duration, coil at 20°C

Note 2

Coil at 120°C

Note 3

1Vpp differential, quadrature, index mark

Note 4

RS422, TTL, 5VDC, differential, quadrature, index mark

Digital resolution = Fundamental resolution * Interpolation Factor * 4

Internal interpolation available x5, x10, x25, x50 (standard), x100

External interpolation available x200, x250

Note 5

Load capacity rated at 1/10 of bearing L10 rating

Note 6

Rated speed based on amplifier bus voltage and motor “Y” winding.

Higher speed (Δ) winding on request.

Actual speed depends on the encoder resolution, interpolation factor and load.

Note 7

-N standard ABEC 5 bearing, -P precision ABEC 7 bearing

 

Model:     

Version:

Encoder:

Cable length: 

Positioning resolution (CPR):

CPR (counts/rev with sine encoder) = lpr * Interpolation_factor_in_servo_amplifier (128 ... 4096)

CPR (counts/rev with digital encoder) includes post-quad multiplication in servo amplifier