Linear motor driven stages

Direct drive linear motor based combination stages are pre-engineered, easily mounted, plug-and-play, ready-to-run modules that combine linear motor technology with air bearings or precision mechanical bearings  to provide, high acceleration, velocity and quick settling with accurate, highly repeatable positioning.



linear actuator with air bearingsLift -Rotary Stages

Integrated dual Z-Theta actuators combines both lift axis and rotary table. Top rotary table moves up and down without any horizontal displacement and provides unlimited rotation capability. Actuator can be supplied with axial through-hole for vacuum, vision or wiring.

 

 lift rotary

bearing

air

air

travel10-70 mmunlimited
resolution0.5 micron1 arc-sec
load10 Kg

 



For complete information about Lift -Rotary Stages, click here


XY table with rotary tableXY-Rotary stages

Air bearing XY-R stage combines Cartesian Planar motor technolgy with RTH direct drive air bearing rotary tables for three axes robotic workcells

 
 

X

Y

rotary 

bearing

 air

 air

 air

travel

2 m

1 m

unlimited

resolution

1 micron

1 micron

1 arc-sec

load

10 kg

 

 



For complete information about XY-Rotary stages, click here


XY table and rotary tableXY-Lift-Rotary stages

Air bearing XY-Z-R stage combines Cartesian Planar motor technolgy with Z-R direct drive air bearing stages for four axes robotic workcells

 
 

     X

     Y

lift

rotary 

travel

2 m

1 m

10 - 70 mm

unlimited

bearing

 air

 air

 air

 air

resolution

1 micron

1 micron

0.5 microns

1 arc-sec

load

10 kg

 



For complete information about XY-Lift-Rotary stages, click here


XY table and rotary tableXY-Rotary system

Precision three axes system combines linear servo motors and Planar ServoRing rotary tables with recirculating ball bearings into high dynamic precision performance.

 
 

X

Y

rotary 

travel   100 - 1000 mm   100 - 1000 mm

unlimited

bearing

recirc. balls

 recirc. balls

 recirc. balls

resolution

 0.1 micron

 0.1 micron

0.25 arc-sec

load

50 kg



For complete information about XY-Rotary system, click here


 
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