Miniature XYZ stages

Precision fine pitch screw driven LSMA Series XY tables and XYZ stages offer superior positioning performance in a very compact, low profile unit. They are ideal for space-critical applications such as optical, laser applications and vacuum operation. Constructed from a special lightweight machined aluminum alloy to provide high stiffness and long-term stability with linear ball bearings for low friction and superior motion smoothness. These precision XY tables and XYZ stages with micrometer-grade screws with pitches 0.25 to 1 mm provides exceptional accuracy, repeatability, and ultra-fine positioning resolution capability to 0.1 micron. Stages can be driven by brushless servo or micro-stepped motor



Open frame XY Microscope stages

stroke XY 

 75 x 75 mm

100 x 100 mm

 200 x 200 mm 

resolution 0.1 µm
load

horizontal 50 kg

vertical 6 kg



For complete information about Open frame XY Microscope stages, click here


XYZ stages LSMA-184

stroke XYZ 

13 x 13 x 13 mm

resolution0.15 - 1.25 µm
load

horizontal 10 kg

vertical 3 kg



For complete information about XYZ stages LSMA-184, click here


XYZ stages LSMA-167

stroke X, Y, Z 

25, 50, 100 mm

resolution0.1 µm
load

horizontal 7 kg

vertical 3 kg



For complete information about XYZ stages LSMA-167, click here


XYZ stages LSMA-175

stroke  X, Y, Z 

50, 100, 150, 200 mm

resolution 0.3 µm
load

horizontal 8 kg

vertical 3 kg



For complete information about XYZ stages LSMA-175, click here


 
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