			Key Features:

			· Direct drive
			· Small profile
			· Brushless servo design
			· Large center aperture
			· Precision bearing system
			· Integrated position feedback
			· LO-COG for smooth motion
			· Built-in thermal sensors

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Rotary table, Planar ServoRing Series, provides superior angular positioning and designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing Stage yields the lowest total cost of ownership.

Brushless Direct Drive maximizes positioning performance of the Planar ServoRing rotary table by utilizing three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance

Compact package and superior design

The design of the Planar ServoRing rotary table was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ServoRing rotary table has large clear center aperture that can be used for air or wire line feed-through or beam delivery

Accurate Positioning

Performance is assured with 18,000 lines encoder that results in 0.65 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.

Model			PSR 200	PSR 300

Tabletop diameter		mm	200	300

Height		mm	42	42

Aperture		mm	40	110

Torque peak		Nm	45	120
continuous		Nm	15	40

Encoder	note 1	lines/rev	1,800 to 18,000

Resolution	note 2	arc-sec	up to 0.36

Load		Kg	25	50

Runout	note 3	micron	3 to 15

Rotating inertia		kg*m²	0.01	0.06

Stage weight		Kg	7	10

Stage construction			rotor - steel stator - hard coated aluminum


note 1	fundamental resolution, model dependent
note 2	after interpolation and quad-edge evaluation
note 3	available in different precision grades

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		Links to other IntelLiDrives rotary tables

		Rotary table, direct drive, medium load capacity
		Rotary table, direct drive, heavy load capacity
		Rotary table, large center opening, air bearings
		Rotary table, direct drive, low profile, air bearings

		Rotary table Sizing

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