rotary table rotary table Key Features:
· Direct drive
· Small profile
· Brushless servo design
· Large center aperture
· Precision bearing system
· Integrated position feedback
· LO-COG for smooth motion
· Built-in thermal sensors

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Rotary table, Planar ServoRing Series,   provides superior angular positioning and designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the Planar ServoRing Stage yields the lowest total cost of ownership.



Brushless Direct Drive maximizes positioning performance of the Planar ServoRing rotary table by utilizing  three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. “Lo-Cog” magnetic design assures smooth rotation and dynamic performance



Compact package and superior design

The design of the Planar ServoRing rotary table was optimized to minimize stage height. The low profile of the stage reduces total system working height. Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and friction. ServoRing rotary table has large clear center aperture that can be used for air or wire line feed-through or beam delivery



Accurate Positioning 

Performance is assured with 18,000 lines encoder that results in 0.65 arc-sec positioning resolution. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make Planar ServoRing the ideal solution for applications requiring frequent directional changes.


Model     PSR 200 PSR 300
Tabletop diameter   mm 200 300
Height   mm 42 42
Aperture   mm 40 110
Torque                peak   Nm 45 120
                   continuous   Nm 15 40
Encoder note 1 lines/rev 1,800 to 18,000
Resolution note 2 arc-sec up to 0.36
Load   Kg 25 50
Runout note 3 micron 3 to 15
Rotating inertia   kg*m2 0.01 0.06
Stage weight   Kg 7 10
Stage construction    

rotor - steel

 stator - hard coated aluminum

note 1  fundamental resolution, model dependent
note 2  after interpolation and quad-edge evaluation
note 3  available in different precision grades



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Links to other IntelLiDrives rotary tables


Rotary table, direct drive, medium load capacity


Rotary table, direct drive, heavy load capacity


Rotary table, large center opening, air bearings

rotary table  

Rotary table, direct drive, low profile, air bearings




Rotary table Sizing


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