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Key Features: |
- Direct drive rotary table |
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- Direct drive linear actuator |
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- Air bearings on all surfaces |
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| - Compatible with stepping motor drives | |
| Request catalog |
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Integrated dual Z-Theta actuator combines direct linear drives for both lift axis and rotary table, provides direct vertical motion, eliminating needs to use wedge and other mechanical translation means. Top rotary table moves up and down without any horizontal displacement. Lift stage have all-around air bearings which can also serve as a fail-safe brake. Air bearing rotary table provides unlimited rotation capability. Actuator can be supplied with axial through-hole for vacuum, vision or wiring. System can be integrated with Planar XY TABLE for multi-axes X-Y-Z-Theta applications. |
PARAMETER |
MODEL |
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| LSM Z 25 | ||||||
| Holding force | lb | 25 | ||||
| Repeatability | note 1 | in | 0.0001 | |||
| Resolution | note 2 | in | 100 | |||
| note 3 | in | 0.0001 | ||||
| Forcer type | PM hybrid | |||||
| Number of coils | 2, 4 | |||||
| Number of phases | 2, 4 | |||||
| Cyclic error | uncorrected | in | 0.001 | |||
| corrected | in | 0.0002 | ||||
| Current per coil | amp | 1.5 | ||||
| Bearing type | Air | |||||
| Air bearing | pressure | psi |
50-60 |
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| flow | scfm | 1.0 | ||||
| Air gap | in |
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0.0004 |
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| Stroke | note 4 | in | 0.4; 0.8; 1.2; 2.0 | |||
| Platen pitch | note 5 | in | 0.040 | |||
| Cumulative pitch error | in / ft | 0.0005 | ||||
| Note 1 | Unidirectional | Note 4 | Consult the factory for longer travel requirements |
| Note 2 | Motor resolution 0.010 in per full step | Note 5 | Consult the factory for other pitch requirements |
| Note 3 | Dependent on micro-stepping resolution |
PARAMETER |
MODEL |
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| SYSTEM | RTH--4 | RTH--6 | ||||
| Static torque | lb ft | 1.5 | 7.5 | |||
| Dynamic torque | note 1 | lb ft | 1.0 |
6.0 |
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| Repeatability | note 2 | arc sec | 3 | |||
| Resolution | note 3 | arc sec | 3.5 | 3.5 | ||
| Operating speed | rpm | 120 | ||||
| Forcer type | PM hybrid | |||||
| Number of phases | 2 | |||||
| Current per coil | amp | 1.5 / 3.0 | ||||
| Bearing type | radial |
note 4 |
air | |||
| axial | air | |||||
| Air bearing | pressure | psi | 40-60 | |||
| flow | scfm | 0.50 | 0.75 | |||
| Axial/radial run-out | in | 0.0002 | ||||
| Air gap | in | 0.0008 | ||||
| Finish | anodized | |||||
| Outside diameter | in | 4 | 6 | |||
| Aperture diameter | in | 0.4 | 0.5 - 1 | |||
| Total height (rotor and stator) | in | 1.2 | 1.45 |
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| Note 1 | with 80VDC micro-stepping driver | Note 3 | With 256 micro-steps/step driver |
| Note 2 | Unidirectional | Note 4 | For ball bearing version contact the factory |