rotary table with linear actuator

rotary table with linear actuator

Key Features:
 

- Direct drive rotary table 

- Direct drive linear actuator

- Air bearings on all surfaces

- Compatible with stepping motor drives
       
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Integrated dual Z-Theta actuator combines direct linear drives for both lift axis and rotary table, provides direct vertical motion, eliminating needs to use wedge and other mechanical translation means. Top rotary table moves up and down without any horizontal displacement. Lift stage have all-around air bearings which can also serve as a fail-safe brake. Air bearing rotary table provides unlimited rotation capability.

Actuator can be supplied with axial through-hole for vacuum, vision or wiring. System can be integrated with Planar XY TABLE for multi-axes X-Y-Z-Theta applications.

 

Lift stage

 

PARAMETER

MODEL

                                 
                   LSM Z 25
                                               
   Holding force        lb 25
   Repeatability note 1 in         0.0001        
   Resolution note 2 in         100        
       note 3 in         0.0001        
   Forcer type             PM hybrid    
   Number of coils                2, 4       
   Number of phases              2, 4       
   Cyclic error uncorrected    in      0.001   
   corrected       in     0.0002   
   Current per coil    amp     1.5   
   Bearing type                    Air     
   Air bearing pressure    psi

    50-60 

    flow        scfm 1.0
   Air gap      in

    

  0.0004  

    

   Stroke note 4 in      0.4; 0.8; 1.2; 2.0     
   Platen pitch note 5 in           0.040         
   Cumulative pitch error   in / ft           0.0005         
                                        
Note 1 Unidirectional Note 4 Consult the factory for longer travel  requirements
Note 2 Motor resolution 0.010 in per full step Note 5 Consult the factory for other pitch requirements
Note 3 Dependent on micro-stepping resolution

Rotary stage

PARAMETER

MODEL

                                 
   SYSTEM                 RTH--4 RTH--6  
                                               
   Static torque         lb ft 1.5      7.5        
   Dynamic torque note 1 lb ft 1.0

6.0

 
   Repeatability note 2 arc sec         3          
   Resolution    note 3 arc sec 3.5 3.5  
   Operating speed rpm         120           
   Forcer type             PM hybrid  
   Number of phases               2    
   Current per coil    amp     1.5 / 3.0           
   Bearing type radial

 note 4  

      air  
      axial            air  
   Air bearing pressure        psi         40-60   
    flow        scfm 0.50   0.75     
   Axial/radial run-out   in                          0.0002  
   Air gap        in           0.0008    
   Finish                anodized     
   Outside diameter          in 4  6  
   Aperture  diameter          in 0.4 0.5 - 1  
   Total height (rotor and stator)    in           1.2

1.45

 
                                           
Note 1 with 80VDC micro-stepping driver Note 3 With 256 micro-steps/step driver
Note 2 Unidirectional Note 4 For ball bearing version contact the factory

 

     
   

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