XYR LSM-XY300x300+RTH-140
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Stroke 300...600 mm Rotation unlimited Load 10 Kg |
Combination of the air bearing Cartesian Planar System with direct drive air bearing rotary tables RTH Series.
|
XY Planar System |
Spec |
Rotary table RTH-140 |
Spec |
|
|
|
|
|
|
travel |
300...600 mm |
Rotation |
unlimited |
|
Repeatability |
± 2 µm |
Repeatability |
± 5 arc-sec |
|
Resolution |
1 µm |
Resolution |
± 2 arc-sec |
|
Load |
10 kg |
Load |
10 kg |
|
Lift velocity |
500 mm/sec |
Angular velocity |
60 rpm |
|
Mechanism |
direct drive |
Mechanism |
direct drive |
|
Motor |
stepper/servo |
Motor |
stepper/servo |
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