XYR-65-10x10-AUT-ACR-65AUT

XYR-65-10x10-AUT-ACR-65AUT
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XY Stroke 10x10 mm
Rotary stage 50 deg 

XY linear motors
Direct drive rotary

Load 2 Kg

DescriptionSpecificationsDrawingsOrderingRelated
XY-Rotary stages with linear motors and direct torque motors designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive linear motor drive provides sub-micron XY positioning and direct drive rotary stage assures sub-arcsec performance

 

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Parameters
 Unit

XY-65-10x10-AUT-ACR-65AUT​

 

XY table

 

  

XY-65-10x10-AUT
Rotary table  

ACR-65UT

Motor type

  

XY linear servo motor
Rotary stage direct torque motor

XY stroke

mm x mm

 

10x10
Angular rotation deg 50 

 

    

Resolution (linear)

micron

0.5
Resolution (rotary) arc-sec 0.6

Repeatability (linear)

 micron

1
Repeatability (rotary) arc-sec 1

Speed

 mm/sec

200
Load weight kg 2

Stage weight

 kg

44

 

 

 

 

There are no ordering details for this product.