Rotary table PSR-325TJ

Rotary table PSR-325TJ
Click to enlarge

Diameter 325 mm

Aperture 164 mm

Height 65 mm


 

Planar ServoRing rotary tables provide superior angular positioning and are designed to eliminate backlash, friction and wear problems associated with worm, gear and belt drives. Low maintenance and high throughput characteristics of the AccuRing stage yields the lowest total cost of ownership.

 

Compact package and Superior design of the AccuRing rotary stages was optimized to minimize stage height. The low profile of the stage reduces total system working height. Cross-roller bearings are used to maximize performance with respect to wobble, moment stiffness and friction. AccuRing stage has large clear center aperture that can be used for air or wire line feed-through or beam delivery.

 

AccuRing utilizes direct drive three phase planar brushless motor technology. There are no brushes to replace and no gear trains or belts to maintain. Coreless magnetic design assures smooth rotation and dynamic performance.

 

Accurate Positioning is assured with contact-less encoder. The motor and rotary encoders are directly coupled to eliminate coupling backlash. The low inertia and zero backlash make AccuRing the ideal solution for applications requiring frequent directional changes.

 

 

Semiconductor assembly

    Electronics assembly

Precision machine tools

    Robotic handlers

Wafer processing

    Automation

 

 
System Performance

Unit

PSR-325TJ

Center aperture

mm

164

Outside diameter

mm

325

Stage height

mm

65

Peak Torque

Tp

 (Nm)

90

Continuous torque

air cooling, coil 120°C

Tc120

(Nm)

30

Peak current at Tp

Amp p rrms

3.4

Continuous current at Tc

Amp c rrms

1.1

Recommended voltage (note 1)

Uvac

110/220

Max speed  

(note 2, 3)

RPM

120

Encoder)

lines/rev
counts/rev

 

31,488    1Vpp

6,297,200    5VTTL

Accuracy

Arc-sec

30

Repeatability Arc-sec 2

Run-out axial/radial

micron

8

Rotor Inertia kg x m2 0.12

Stage weight

M (Kg)

20

Axial load

M (Kg)

500

 

Note 1: Rotary table can operate at lower voltages with lower speeds

Note 2: Max speed shown with no external torque applied

Note 3: Max speed may be limited by controller's encoder frequency input.

            Sin/cos 1 Vpp and other encoder resolutions available.

            Contact the factory.

 

 

There are no ordering details for this product.