Low profile, short-stroke XY stages with linear motors and micron-grade linear encoders

|
XY stage XY-65x10x10AUT |
Spec |
|
Stroke (mm) |
10x10 |
|
Repeatability (µm) |
0.5 |
|
Resolution (µm) |
0.5 |
|
Load capacity (kg) |
2.5 |
|
Velocity (mm/sec) |
500 |
|
Drive mechanism |
direct drive |
|
Motor |
linear, core-less, servo |
| Size (mm) | 65x65 |
| Height (mm) | 15 |