XY-OF-300x300J+ACR335UT
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Stroke 300x300 mm Aperture dia 335 mm Load 20 Kg |
Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.
 XY-OF-UL-200x200+ACR160UT XY-OF-UL-200+ACR160UT $0.00 |
XY-OF-UL-280x280+ACR260UT XY-OF-UL-280+ACR260UT $0.00 |
|
XY stage XY-OF-300x300J |
Spec |
Rotary Stage ACR-335UT |
Spec |
| Drive | Ball screw | Drive | Direct drive |
| Aperture (mm) | 335 | ||
|
Stroke (mm) |
300 x 300 |
Rotation |
unlimited |
|
Resolution (µm) |
standard 5 microns |
Resolution (arc-sec) |
1 |
|
Load capacity (kg) |
20 |
Open center (mm) |
20 |
|
Velocity (m/sec) |
40 with stepper motor |
Angular velocity (rpm) |
100 |
|
Motor |
stepper/servo/encoder |
Motor |
Direct drive |
This system can be supplied with different apertures and travels.
Contact us with application requirements.
There are no ordering details for this product.
