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XY-OF-UL-200x200+ACR160UT


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DescriptionSpecificationsDrawingsRelated

Open-frame XY-Rotary stages designed with a low profile for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer.

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XY-OF-UL-280x280+ACR260UT
XY-OF-UL-280x280+ACR260UT
XY-OF-UL-280+ACR260UT

Stroke 280x280 mm

Aperture 260x260 mm

Load 30 Kg

XY-OF-UL-350x350+ACR335UT
XY-OF-UL-350x350+ACR335UT
XY-OF-UL-350-ACR335UT

Stroke 350x350 mm

Aperture 335x335 mm

Load 30 Kg

Parameters
Unit

XY-OF-UL-200x200+ACR160UT 

 

XY-OF-UL-280x280+ACR260UT 

XY-OF-UL-350x350+ACR335UT

 

XY table

 

 

XY-OF-UL-200x200

XY-OF-UL-280x280

XY-OF-UL-350x350

 

Rotary table  

ACR-160UT

ACR-260UT

ACR-335UT

Motor type

 

brushless servo motor /encoder (standard)

linear servo motor (option)

XY stroke

mm x mm

 

200 x 200

-

 

280 x 280

 

-

 

350 x 350

 

-

Angular rotation deg -

360

-

360

-

360

Center aperture

dia mm

160

260

335

Resolution (linear)

micron

1 (note 1,2)

2.5 (note 3)

-

1 (note 1,2)

2.5 (note 3)

-

1 (note 1,2)

2.5 (note 3)

-
Resolution (rotary) arc-sec -

1.4

-

1

-

0.9

Repeatability (linear)

micron

5 (note 3)

1 (notes 1,2)

Repeatability (rotary) arc-sec 2

Speed

mm/sec

400  (note 3)

800  (note 2)

Load weight kg 30

Stage weight

kg

16

22

28

 

 

 

(note 1)     with linear encoder (option)

(note 2)     with linear servo  motor (option)

(note 3)     ball screw 10 mm lead, brushless servo driven

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