XY-OF-300x300J+ACR335UT
Open-frame low profile XY-Rotary stages designed for wafer handling and many other automated accurate positioning applications in semiconductor manufacturing industries. XY drive mechanism located on the side of the unit and large center hole-through rotary table offer a clear unobstruced access to the wafer from both sides.
 XY-OF-UL-200x200+ACR160UT XY-OF-UL-200+ACR160UT Stroke 200x200 mm Aperture 160x160 mm Load 30 Kg |
XY-OF-UL-280x280+ACR260UT XY-OF-UL-280+ACR260UT Stroke 280x280 mm Aperture 260x260 mm Load 30 Kg |
|
XY stage XY-OF-300x300J |
Spec |
Rotary Stage ACR-335UT |
Spec |
| Drive | Ball screw | Drive | Direct drive |
| Aperture (mm) | 335 | ||
|
Stroke (mm) |
300 x 300 |
Rotation |
unlimited |
|
Resolution (µm) |
standard 5 microns |
Resolution (arc-sec) |
1 |
|
Load capacity (kg) |
20 |
Open center (mm) |
20 |
|
Velocity (m/sec) |
40 with stepper motor |
Angular velocity (rpm) |
100 |
|
Motor |
stepper/servo/encoder |
Motor |
Direct drive |
This system can be supplied with different apertures and travels.
Contact us with application requirements.
