Series rotary tables provide superior angular positioning and are
designed to eliminate backlash, friction and wear problems associated
with worm, gear and belt drives.
They combine axial
brushless RotoLinearTM motoring modules and planar air
bearings integrated in a compact, direct drive configuration. Large area
air bearings provide sufficient payload stiffness and maximizes
performance in respect to wobble and
RotoLinearTM motoring modules provide high positioning
stiffness during rotary indexing and when installed on moving XY tables.
tables provide unlimited rotation and are capable of precise positioning
and velocity controls when used with micro-stepping drives. Can also be
feedback for closed loop operation.
can be mounted in any orientation and have "large open center design".
When used in processing 12" semiconductor wafers, every area of the
wafer can be accessed.
In general automation
applications large open center offers the opportunity to access parts
from inside and outside of the table simultaneously. This feature allows
robotic devices, pick and place and ancillary tooling to be mounted
inside the table, saving floor space and reducing parts handling with
Series rotary tables
for high capacity high speed rotary table applications.