News - Compact and Precise Four Axes XY-Z-Rotary stage
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SPECIFICATIONS
- XY TRAVEL 50x50 ... 200x200 mm
- Z LIFT TRAVEL 5 ... 25 mm
- ROTATION UNLIMITED
- LINEAR RESOLUTION 0.25 micron
- ROTATION RESOLUTION 1 arc-sec
The demand for a high accuracy, compact XYZR stages is met with IntelLIDrives technologies that address the unique
needs of scanning microscopy, wafer and printed circuit board inspection, automated assembly and wide range of
specimens and samples scanning in many types of imaging techniques and micro-machining applications.
needs of scanning microscopy, wafer and printed circuit board inspection, automated assembly and wide range of
specimens and samples scanning in many types of imaging techniques and micro-machining applications.
Very precise fine positioning and control is easily achieved through the combination of a stable closed-loop
control system and an associated joystick option. These stages can be motorized with stepper motors and brush-less servo motors with encoders
control system and an associated joystick option. These stages can be motorized with stepper motors and brush-less servo motors with encoders
Optional high-resolution, non-contact linear encoder is available. This non-contact encoder offers exceptional
repeatability and stability over a range of operating conditions. Both digital and analog output versions are available
repeatability and stability over a range of operating conditions. Both digital and analog output versions are available
with resolutions in sub-micron range.