XY and XYZ Systems
IntelLiDrives, Inc. manufactures a large selection of linear actuators that utilize brushless linear direct-drive servomotors, linear stepper motors as well as precison ball screw actuators driven with brush, brushless or rotary stepper motors. Travels for our linear actuators range from 10 mm to 5 meters. These stages are utilized in in industrial robots, fiberoptics and photonics, vision systems, machine tools, assembly, semiconductor equipment, medical component manufacturing, electronic manufacturing, and other industrial automation applications.

XY tables
XY Tables with stacked linear actuators that utilize brushless linear direct-drive servomotors or precison ball screws

Motorized Belt XY-XYZ systems
Automation Series XYZ robotic arm, XYZ gantry and XYZ desktop robot with Motorized Belt actuators.

Ball Screw XY-XYZ systems
Automation Series XYZ robotic arm, XYZ gantry and XYZ desktop robot with Ball Screw actuators.

Linear Motor XY-XYZ systems
Linear Motor Direct Drive multi-axes XYZ solutions are pre-engineered, easily mounted, plug-and-play, ready-to-run systems.

Large Open Frame XY tables
Large open center XY table with Ball Screw mechanisms offer long travel and clear unobstructed two axes aperture

Vertical XY and XYZ gantries
Vertical XY and XYZ gantries with linear motors and motorized belt actuators

Compact XY and XYZ stages
Precision Fine Pitch Screw driven XY stage and XYZ stage offer superior positioning performance in a very compact, low profile unit.

Open Frame XY-Rotary systems
Long travel XY stage in combination with large clear hole-through rotary table offers three degree of freedom unobstructed aperture.

Microscope XY stages
Open center XY stage designed with a low profile and center opening for automated microscopy based applications.
XY Tables and XYZ Motion Systems
IntelLiDrives® XY tables and XYZ motion systems provide high‑precision, multi‑axis linear positioning for automation, inspection, semiconductor, photonics, and medical manufacturing. These systems combine rigid mechanical construction, precision linear guides, and ball‑screw, belt‑drive, or linear‑motor actuation to deliver smooth, accurate, and repeatable motion across two or three axes.
Our modular platform allows you to configure XY, XYZ, or XY‑Theta systems using standard linear stages, Z‑axis lifts, and rotary modules. This flexibility makes IntelLiDrives solutions ideal for OEM machine builders, research labs, and high‑throughput industrial automation.
XY Tables
IntelLiDrives XY tables provide coordinated two‑axis planar motion for applications requiring precise positioning, scanning, alignment, dispensing, or pick‑and‑place operations. Systems are available with:
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Ball‑screw drives for high thrust and micron‑level repeatability
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Linear‑motor drives for high speed, zero backlash, and smooth servo performance
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Belt‑drive systems for long travel and high‑speed automation
Travel ranges extend from 50 mm to over 1500 mm, with load capacities suitable for sensors, cameras, tooling, and heavy payloads.
XYZ Motion Systems
XYZ systems add a vertical Z‑axis to create a complete three‑axis motion platform. These systems support:
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Precision assembly and inspection
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Laser machining and micro‑processing
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Optical alignment and photonics packaging
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Automated metrology and scanning
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Robotics and material handling
Z‑axis modules are available in ball‑screw, linear‑motor, and compact lift configurations, with encoder resolutions down to 0.1 µm.
Key Features
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High‑rigidity aluminum or steel frames
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Precision linear guides for smooth, stable travel
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Encoder feedback for closed‑loop accuracy
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Travel lengths from 50 mm to 1500+ mm
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Repeatability to ±1–5 µm
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Speeds up to 2–3 m/s (linear motor)
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Load capacity up to 200+ kg
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Cleanroom‑ready and vacuum‑compatible options
Applications
IntelLiDrives XY and XYZ systems are used in:
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Semiconductor wafer inspection
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Laser processing and micromachining
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Photonics alignment and fiber‑optic assembly
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Precision dispensing and micro‑fluidics
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Automated metrology and scanning
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Robotics and pick‑and‑place automation
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Medical device manufacturing
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3D printing and additive manufacturing
System Integration
- Multi-Axis Trajectory Control: Supports coordinated XY and XYZ trajectories, G-code execution, point-to-point positioning, and contouring profiles.
- Plug-and-Play Deployment: Engineered for fast, seamless integration into industrial automation cells, research laboratory environments, and OEM machine builder systems.
- Industry-Standard Communication: Features native hardware compatibility with EtherCAT, CANOpen, Modbus, and USB networks.
- Software API Ecosystem: Includes dedicated development APIs for Windows and Linux environments, with full support for LabVIEW, MATLAB, and Python.
XY & XYZ Motion Systems Comparison
| Motion Technology | Drive Mechanism | Travel Range | Accuracy | Key Advantages | Best Applications |
|---|---|---|---|---|---|
| Brushless Linear Direct‑Drive XY Tables | Linear motor | 10 mm – 5 m | Sub‑micron | High speed, zero backlash, smooth motion | Semiconductor tools, photonics alignment, robotics |
| Ball Screw XY Tables | Precision ball screw | 10 mm – 5 m | Micron‑level | High stiffness, cost‑effective, robust | Machine tools, assembly automation, medical devices |
| Motorized Belt XY/XYZ Systems | Belt drive | Long travel | Moderate | High speed, quiet, economical | Gantry robots, liquid dispensing, inspection |
| Linear Motor XYZ Systems | Direct‑drive linear motor | Long travel | Sub‑micron | Plug‑and‑play, high precision, fast response | Vision systems, fiber optics, electronic manufacturing |
| Large Open‑Frame XY Tables | Ball screw | Long travel | Micron‑level | Clear aperture for optics/cabling | Optical systems, CT scanning, microscopy |
| Vertical XY/XYZ Gantries | Linear motor or belt | Long travel | Micron‑level | Vertical integration, high load capacity | Robotics, packaging, assembly |
| Compact XY/XYZ Stages | Fine pitch screw | Short travel | High precision | Low profile, compact footprint | Portable inspection, tight‑space |










