Compact XY and XYZ stages
Precision Fine Pitch Screw driven XY stage and XYZ stage offer superior positioning performance in a very compact, low profile unit.
XY-XYZ stages with Linear Motors
|
travel area |
10 ... 300 mm |
|
velocity |
1 m/sec |
|
load |
1 ... 10 Kg |
Compact XY and XYZ stages with linear motors and micron-grade encoders
XY-XYZ stages BSMA-LY-110
|
X, Y, Z stroke |
30, 50, 75 mm |
|
resolution |
1 µm |
|
load |
horizontal 5 kg vertical 3 kg |
XY-XYZ stages BSMA-LY-140H
|
X, Y, Z stroke |
100, 200, 300 mm |
|
resolution |
1 µm |
|
load |
horizontal 16 kg vertical 5 kg |
XY-XYZ stages LSMA-167
|
X, Y, Z stroke |
25, 50, 100 mm |
|
resolution |
0.1 µm |
|
load |
horizontal 7 kg vertical 3 kg |
XY-XYZ stages BSMA-F40/80/120
|
X, Y, Z stroke |
100, 200, 300 mm |
|
resolution |
1 µm |
|
load |
horizontal 10 kg vertical 3 kg |
Micro XY-XYZ stages TS-15J
|
X, Y, Z stroke |
15 mm |
|
resolution |
0.1 µm |
|
load |
horizontal 3 kg vertical 1 kg |
