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Linear Actuators, Rotary Tables and XYZ Systems
for Motion Control Automation
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You are here:    Home > XY and XYZ Systems > Compact XY and XYZ stages
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      • XY-XYZ stages with Linear Motors
      • XY-XYZ stages BSMA-LY-110
      • XY-XYZ stages BSMA-LY-140H
      • XY-XYZ stages LSMA-167
      • XY-XYZ stages BSMA-F40/80/120
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Compact XY and XYZ stages

Precision Fine Pitch Screw driven XY stage and XYZ stage offer superior positioning performance in a very compact, low profile unit. 

XY stage with linear motors

XY-XYZ stages with Linear Motors

 travel area

10 ... 300 mm

 velocity

1 m/sec

 load

1 ... 10 Kg


Compact XY and XYZ stages with linear motors and micron-grade encoders



XY-XYZ stages BSMA-LY-110

X, Y, Z stroke

30, 50, 75 mm

resolution

 1 µm

load

 horizontal 5 kg

 vertical 3 kg

 



XY-XYZ stages BSMA-LY-140H

X, Y, Z stroke

100, 200, 300 mm

resolution

 1 µm

load

 horizontal 16 kg

 vertical 5 kg

 



XY-XYZ stages LSMA-167

X, Y, Z stroke

 25, 50, 100 mm

resolution

 0.1 µm

load

 horizontal 7 kg

 vertical 3 kg

 



XY-XYZ stages BSMA-F40/80/120

X, Y, Z stroke

100, 200, 300 mm

resolution

 1 µm

load

 horizontal 10 kg

 vertical 3 kg

 

Micro XYZ stage

Micro XY-XYZ stages TS-15J

X, Y, Z stroke

15 mm

resolution

 0.1 µm

load

 horizontal 3 kg

 vertical 1 kg

 



Motorized XY and XYZ stages

These actuators are still manufactured but not standard stock products

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