Micro XY-XYZ stages TS-15J
|
X, Y, Z stroke |
15 mm |
|
resolution |
0.1 µm |
|
load |
horizontal 3 kg vertical 1 kg |
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Linear Actuators, Rotary Tables and XYZ Systems
for Motion Control Automation
for Motion Control Automation
Linear and Rotary Motion in its Simplest Form™
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