|
|
 |
Applications: |
| - 300 mm wafer processing | |
| - die bonders and die sorters | |
- open frame XY tables |
|
| - SMT advanced packaging systems | |
| - wafer inspection | |
| - pharmaceutical packaging | |
| - laboratory automation | |
| - automated assembly | |
|
IntelLiDrives, Inc. brings automated, high precision multi-axes tables to a wide range of positioning applications, including wafer, mask and die inspection and wafer handling systems in die attach applications. These table features three-piece construction. XY tables utilizes linear ball bearing guides with high precision ball screws or direct drive linear motors. Rotary table uses direct drive air bearing rotary motor. The low profile table and large 350 mm center aperture permits processing 300 mm wafers. The XY tables can be supplied with Z axis and rotational cabling system, as well as wafer holder and wafer frame film stretching mechanism. Table also manufactured in split Y-axis configuration for foot print savings |
SPECIFICATIONS
| Parameter | X | Y | Theta | |
| travel | 330 mm | 360 deg continuous | ||
| accuracy (per axis) | 15 mkm | 20 arc-sec | ||
| repeatability | 2 mkm | 3 arc-sec | ||
| resolution | 1 mkm | 2 arc-sec | ||
| orthogonality | 10 mkm | - | ||
| speed | 600 mm/sec | 50 RPM | ||
| drive |
precision ball screw (standard) linear motor (optional) |
Direct drive rotary |
||
| bearings |
recirculating ball bearings guide |
air bearings radial and axial |
||
|
Links to other IntelLiDrives XY tables |
||||
 |
||||
 |
||||
 |
||||
 |
Single axis robotic arm Linear ServoSlide | |||
 |
Single axis robotic arm I-Thrust | |||
|
||||