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XY tables


- 300 mm wafer processing
- die bonders and die sorters

- open frame XY tables

- SMT advanced packaging systems
- wafer inspection
- pharmaceutical packaging
- laboratory automation
- automated assembly



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IntelLiDrives, Inc. brings automated, high precision multi-axes tables to a wide range of positioning applications, including wafer, mask and die inspection and wafer handling systems in die attach applications. These table features three-piece construction. XY tables utilizes linear ball bearing guides with high precision ball screws or direct drive linear motors. Rotary table uses direct drive air bearing rotary motor. The low profile table and large 350 mm center aperture permits processing 300 mm wafers. The XY tables can be supplied with Z axis and rotational cabling system, as well as wafer holder and wafer frame film stretching mechanism.  Table also manufactured in split Y-axis configuration for foot print savings




Parameter   X Y Theta
travel   330 mm 360 deg continuous
accuracy (per axis)   15 mkm 20 arc-sec
repeatability   2 mkm 3 arc-sec
resolution   1 mkm 2 arc-sec
orthogonality   10 mkm -
speed   600 mm/sec 50 RPM

precision ball screw (standard)

linear motor (optional)

Direct drive



recirculating ball bearings guide

air bearings

radial and axial



Links to other IntelLiDrives XY tables

XY tables

Gantry Systems

XY tables

Robotic arms

Cartesian Planar Systems

Single axis robotic arm Linear ServoSlide
    Single axis robotic arm I-Thrust

Click HERE to enter new IntelLiDrives website