Compact XY and XYZ stages
Precision Fine Pitch Screw driven XY stage and XYZ stage offer superior positioning performance in a very compact, low profile unit.
![XY stage with linear motors XY stage with linear motors](https://www.intellidrives.com/images/cache/data/image_XY-65-10x10AUT v2-150x150.jpg)
XY-XYZ stages with Linear Motors
travel area |
10 ... 300 mm |
velocity |
1 m/sec |
load |
1 ... 10 Kg |
Compact XY and XYZ stages with linear motors and micron-grade encoders
![](https://www.intellidrives.com/images/cache/data/image_XYZ-BSMA-LY-110-30x30x30-150x150.jpg)
XY-XYZ stages BSMA-LY-110
X, Y, Z stroke |
30, 50, 75 mm |
resolution |
1 µm |
load |
horizontal 5 kg vertical 3 kg |
![](https://www.intellidrives.com/images/cache/data/image_XYZ-LY-140H-200x200x200-150x150.jpg)
XY-XYZ stages BSMA-LY-140H
X, Y, Z stroke |
100, 200, 300 mm |
resolution |
1 µm |
load |
horizontal 16 kg vertical 5 kg |
![](https://www.intellidrives.com/images/cache/image 8MT167-XYZ_1-150x150.jpg)
XY-XYZ stages LSMA-167
X, Y, Z stroke |
25, 50, 100 mm |
resolution |
0.1 µm |
load |
horizontal 7 kg vertical 3 kg |
![](https://www.intellidrives.com/images/cache/data/image_XYZ-BSMAE-F40-150x150.jpg)
XY-XYZ stages BSMA-F40/80/120
X, Y, Z stroke |
100, 200, 300 mm |
resolution |
1 µm |
load |
horizontal 10 kg vertical 3 kg |
![micro XYZ stage Micro XYZ stage](https://www.intellidrives.com/images/cache/data/image_XYZ-TS-15x15x15-150x150.jpg)
Micro XY-XYZ stages TS-15J
X, Y, Z stroke |
15 mm |
resolution |
0.1 µm |
load |
horizontal 3 kg vertical 1 kg |