XY-LSS-LMX-100x100
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Low profile, XY stages with linear motors and micron-grade linear encoders
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 XY-65-10x10AUT XY-65-10x10AUT Linear motors Resolution 0.5 µm Stage 65x65 mm Load 2.5 Kg |
 XY-LSS-LMX-25x25 XY-LSS-LMX-25x25 Linear motors Resolution 0.5 µm Load 5 Kg |
|
XY stage XY-LSS-LMX-100x100 |
Spec |
|
Stroke (mm) |
100x100 |
|
Repeatability (µm) |
0.5; 1.0 |
|
Resolution (µm) |
0.5; 1 |
|
Load capacity (kg) |
5 |
|
Velocity (mm/sec) |
500 |
|
Drive mechanism |
direct drive |
|
Motor |
linear, core-less, servo |
| Size (mm) | 120x120 |
| Height (mm) | 75 |