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XYZR LSM600x600+LSMZ90-12+RTHM100


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DescriptionSpecificationsDrawingsRelated

Combination of XY Planar Air bearing table with RotoLinear Air bearing Lift-Rotary stages.

 

 - XY stroke 450x450 mm

 - Lift 12 mm

 - Unlimited rotation

Click Below Images To Enlarge

XYZR LSMA-200x200+MLVT100-25+RTHM190
XYZR LSMA-200x200+MLVT100-25+RTHM190
LSMA200+MLVT25-RTHM190

XY Stroke 200x200 mm

Lift stroke 25

Rotation unlimited

Load 10 Kg

XYZR LSMA-100x100+MLVT70-13+RTHM151
XYZR LSMA-100x100+MLVT70-13+RTHM151
LSMA100+MLVT13+RTHM151

XY Stroke 100x100 mm

Lift stroke 13

Rotation unlimited

Load 5 Kg

XYZR BSMA-750x750+LSZ12W+PSR150-30
XYZR BSMA-750x750+LSZ12W+PSR150-30
XYZR-BSMA+LSZ12+PSR150

XY Stroke 750x250 mm

Lift stroke 12 mm

Rotation unlimited

Load 10 Kg

XY Planar System

 

 Spec 

Lift Stage

L90-12

 Spec 

Rotary Stage

R100

 Spec 

Stroke (mm)

450 x 450

Lift (mm)

12

Rotation

unlimited

Repeatability (µm)

3

Repeatability (µm)

2

Repeatability (arc-sec)

1

Resolution (µm)

1

Resolution (arc-sec)

1

Resolution (arc-sec)

1

Load capacity (kg)

5

Bearing

air

Bearing

air

Velocity (mm/sec)

500

Max velocity (mm/sec)

50

Angular velocity (rpm)

120

Mechanism 

 

direct drive

linear motor

Mechanism

direct drive

linear motor

Mechanism,

ratio

direct drive

rotary motor

Motor

stepper servo

Motor

stepper

servo

Motor

stepper

servo

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