XYZR LSMA-100x100+MLVT70-13+RTHM151
Combination of XY lead-screw driven LSMA XY stages with Lift MLVT stages and worm gear rotary RTHM table
- XY stroke 100x100 mm
- Lift 13 mm
- Unlimited rotation
 XYZR LSMA-200x200+MLVT100-25+RTHM190 LSMA200+MLVT25-RTHM190 XY Stroke 200x200 mm Lift stroke 25 Rotation unlimited Load 10 Kg |
 XYZR LSM600x600+LSMZ90-12+RTHM100 LSM600+LSMZ12+RTHM100 XY Stroke 450x450 mm Lift stroke 12 Rotation unlimited Load 5 Kg |
 XYZR BSMA-750x750+LSZ12W+PSR150-30 XYZR-BSMA+LSZ12+PSR150 XY Stroke 750x250 mm Lift stroke 12 mm Rotation unlimited Load 10 Kg |
|
XY stage LSMA-200 |
Spec |
Lift Stage MLVT-70-13 |
Spec |
Rotary Stage RTHM-151 |
Spec |
|
Stroke (mm) |
100 x 100 |
Lift (mm) |
13 |
Rotation |
unlimited |
|
Repeatability (µm) |
1 |
Repeatability (µm) |
2 |
Repeatability (arc-sec) |
20 |
|
Resolution (µm) |
0.3 |
Resolution (arc-sec) |
1 |
Resolution (arc-sec) |
0.5 |
|
Load capacity (kg) |
6 |
Lift translation (mm/rev) |
1 |
Torque (Nm) |
0.5 |
|
Velocity (mm/sec) |
20 (servo) |
Max velocity (mm/sec) |
20 |
Angular velocity (rpm) |
8 |
|
Mechanism, screw lead (mm) |
lead-screw 0.5 |
Mechanism, screw lead (mm) |
direct drive screw 1 |
Mechanism, ratio |
worm gear 180:1 |
|
Motor |
stepper servo |
Motor |
stepper |
Motor |
stepper servo |
